Coherent EUV Light Generation and Its Application on Nanometrology

Ming-Chang Chen^1,2*

¹Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, Taiwan
²Physics, National Tsing Hua University, Hsinchu, Taiwan

* Presenter:Ming-Chang Chen, email:mingchang.chen@gmail.com

Recently, ultrafast, coherent EUV science and technology has received a lot of attentions, especially with respect to tabletop EUV produced by high harmonic generation. The femtosecond-to-attosecond EUV pulse enables the dynamics of chemical reactions and nano-materials to be studied with unprecedented temporal and spatial resolution. In this talk, I will first demonstrate how we produce bright coherent EUV light and how we demonstrate the first polarization control of isolated attosecond pulses. Such unique light sources will drive the applications like nano-imaging, 13.5nm metrology and resolving the fastest dynamics in quantum world.

Keywords: Attosecond Science, Ultrafast Phenomena , EUV Optics